- Technical data
|Performance||HR R>99.8%@1064nm HT T>95%@805nm&532nm|
Film Coating Line
OTFC-1300 OPTORUN coater advanced from Japan. With 17 cm RF ion source, the IAD is very strong and good for film surface quality and adhesion. Combine the optical and crystal film thickness control system, It is specialized in complex film coating.
Symphony-9 coater made from Tecport, the width of coating chamber is 900mm.Its advantage is Hall Ion Source and CTI-cryogenics pump. Ion source technology can improve the coating's physical and chemical performance, such as hardness, adhesion, high densification, oxygenation and so on.
Coating material is used some high pure metals, dielectrics and semiconductors. Normally the pure of coating material is higher than 99.99%. All of our coating materials are according with RoHS request. Main coating materials we used are:
1) Metal: Au, Ag, Al, Cu, Cr, Ni-Cr
2) Oxides: TiO2, Nb2O5, Ta2O5, ZrO2, HfO2, Gd2O3, Al2O3, SiO2, and some mixture materials (such as H4, M1, M3)
3) Fluorides: MgF2, LaF3
4) Sulfides: ZnS
5) Semiconductors: Si, Ge